Title :
Integrated silicon optomechanical transducers and their application in atomic force microscopy
Author :
Jie Zou ; Houxun Miao ; Michels, Thomas ; Aksyuk, Vladimir
Author_Institution :
Center for Nanoscale Sci. & Technol., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Abstract :
We present integrated optomechanical transducers with exposed tips and demonstrate ultrahigh force sensitivity and large bandwidth. The transducer is implemented as an atomic force microscope probe in the contact mode and nanoscale resolution is demonstrated.
Keywords :
atomic force microscopy; fibre optic sensors; integrated optics; optical fibre couplers; silicon; transducers; atomic force microscope probe; contact mode; exposed tips; integrated silicon optomechanical transducers; nanoscale resolution; ultrahigh force sensitivity; Cavity resonators; Force; Nanoscale devices; Optical sensors; Probes; Surface topography; Transducers;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
