Title :
Fabrication of diffractive optical elements with digital projection photochemical etching
Author :
Edwards, Chris ; Kaiyuan Wang ; Griffin, Benjamin G. ; Renjie Zhou ; Bhaduri, Basanta ; Popescu, Gabriel ; Goddard, L.L.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Illinois at Urbana-Champaign, Urbana, IL, USA
Abstract :
We demonstrate a new fabrication technique called digital projection photochemical etching and apply it to make complicated gray-scale diffractive optical elements, such as a radial sinusoidal grating, in a single processing step.
Keywords :
diffraction gratings; diffractive optical elements; microfabrication; microlenses; optical fabrication; optical projectors; photolithography; diffractive optical element fabrication; digital projection photochemical etching; radial sinusoidal grating; Diffraction; Diffraction gratings; Etching; Gray-scale; Optical device fabrication; Optical imaging;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
