Title :
Dispersion engineering of silicon microdisk resonators by thermal oxidation
Author :
Jiang, Wei C. ; Usechak, Nicholas G. ; Qiang Lin
Author_Institution :
Inst. of Opt., Univ. of Rochester, Rochester, NY, USA
Abstract :
We demonstrate a convenient approach for precise dispersion engineering of silicon microdisk resonators via thermal oxidation. This technique potentially enables efficient correlated photon-pair generation for quantum photonics.
Keywords :
elemental semiconductors; micro-optics; microcavities; optical fabrication; optical resonators; oxidation; quantum optics; silicon; Si; efficient correlated photon-pair generation; precise dispersion engineering; quantum photonics; silicon microdisk resonators; thermal oxidation; Dispersion; Optical device fabrication; Optical imaging; Optical resonators; Oxidation; Photonics; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
