DocumentCode
1771614
Title
Dispersion engineering of silicon microdisk resonators by thermal oxidation
Author
Jiang, Wei C. ; Usechak, Nicholas G. ; Qiang Lin
Author_Institution
Inst. of Opt., Univ. of Rochester, Rochester, NY, USA
fYear
2014
fDate
8-13 June 2014
Firstpage
1
Lastpage
2
Abstract
We demonstrate a convenient approach for precise dispersion engineering of silicon microdisk resonators via thermal oxidation. This technique potentially enables efficient correlated photon-pair generation for quantum photonics.
Keywords
elemental semiconductors; micro-optics; microcavities; optical fabrication; optical resonators; oxidation; quantum optics; silicon; Si; efficient correlated photon-pair generation; precise dispersion engineering; quantum photonics; silicon microdisk resonators; thermal oxidation; Dispersion; Optical device fabrication; Optical imaging; Optical resonators; Oxidation; Photonics; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6989522
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