Title :
Multilayer platform for low-power/passive configurable photonic device
Author :
Sodagar, Majid ; Hosseinnia, Amir Hossein ; Eftekhar, Ali Asghar ; Alibi, Ali
Author_Institution :
Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
We demonstrate the possibility of forming ultra-compact, field-configurable, and low-power resonance-based passive integrated photonic structures based on charge accumulation in a high-quality multilayer material platform comprising Si/SiO2/Si layers prepared through direct bonding of SOI wafers.
Keywords :
bonding processes; elemental semiconductors; integrated optics; multilayers; silicon; silicon compounds; silicon-on-insulator; SOI wafers; Si-SiO2-Si; charge accumulation; direct bonding; field-configurable passive integrated photonic structures; low-power passive configurable photonic device; low-power resonance-based passive integrated photonic structures; multilayer platform; ultra-compact passive integrated photonic structures; Modulation; Optical device fabrication; Optical imaging; Optical resonators; Optical switches; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
