Title :
Integrated crystalline silicon and silicon nitride photonic devices on plastic substrates
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN, USA
Abstract :
Fully integrated photonic devices based on single-crystal silicon and silicon nitride including ring resonators and grating couplers have been successfully transferred to flexible plastic substrate with one hundred percent yield and uncompromised performance.
Keywords :
diffraction gratings; elemental semiconductors; integrated optoelectronics; optical couplers; optical resonators; silicon; silicon compounds; Si; Si3N4; flexible plastic substrate; fully integrated photonic devices; grating couplers; integrated crystalline silicon photonic devices; ring resonators; silicon nitride photonic devices; single-crystal silicon; Gratings; Optical ring resonators; Photonics; Positron emission tomography; Silicon; Silicon nitride; Substrates;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
