• DocumentCode
    1771618
  • Title

    Integrated crystalline silicon and silicon nitride photonic devices on plastic substrates

  • Author

    Yu Chen ; Mo Li

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN, USA
  • fYear
    2014
  • fDate
    8-13 June 2014
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Fully integrated photonic devices based on single-crystal silicon and silicon nitride including ring resonators and grating couplers have been successfully transferred to flexible plastic substrate with one hundred percent yield and uncompromised performance.
  • Keywords
    diffraction gratings; elemental semiconductors; integrated optoelectronics; optical couplers; optical resonators; silicon; silicon compounds; Si; Si3N4; flexible plastic substrate; fully integrated photonic devices; grating couplers; integrated crystalline silicon photonic devices; ring resonators; silicon nitride photonic devices; single-crystal silicon; Gratings; Optical ring resonators; Photonics; Positron emission tomography; Silicon; Silicon nitride; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2014 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6989524
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1771618