Title :
Photonic crystal cavities in cubic silicon carbide
Author :
Radulaski, Marina ; Buckley, Sonia ; Zhang, Leiqi ; Rundquist, Armand ; Babinec, Thomas M. ; Provine, J. ; Alassaad, Kassem ; Ferro, Gabriel ; Vuckovic, Jelena
Author_Institution :
E.L. Ginzton Lab., Stanford Univ., Stanford, CA, USA
Abstract :
We present high quality factor (Q ~ 103) photonic crystal cavities in cubic silicon carbide (3C-SiC) films grown directly on silicon. We show results in shifted-L3 and nanobeam cavity geometries for applications in nonlinear and quantum photonics.
Keywords :
Q-factor; nanophotonics; photonic crystals; semiconductor thin films; silicon compounds; wide band gap semiconductors; Si; SiC; cubic silicon carbide films; high quality factor photonic crystal cavity; nanobeam cavity geometry; nonlinear photonics; quantum photonics; shifted-L3 cavity geometry; Cavity resonators; Nonlinear optics; Optical device fabrication; Optical imaging; Photonic crystals; Q-factor; Silicon carbide;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
