DocumentCode
1771891
Title
Very large scale integrated photonics (VLSI-P)
Author
Watts, Michael R. ; Jie Sun ; Timurdogan, Erman ; Hosseini, Ehsan S. ; Sorace-Agaskar, Cheryl ; Yaacobi, Ami ; Zhan Su ; Moresco, Michele ; Purnawirman ; Bradley, Jonathan ; Leake, Gerald ; Adam, T.N. ; Coolbaugh, Douglas D.
Author_Institution
Res. Lab. of Electron., Massachusetts Inst. of Technol., Cambridge, MA, USA
fYear
2014
fDate
8-13 June 2014
Firstpage
1
Lastpage
2
Abstract
We present on the demonstration of a number of critical device technologies including record low power modulators, tunable filters, and integrated lasers, along with the world´s largest silicon photonic circuit, integrated on a 300mm platform.
Keywords
VLSI; integrated optics; optical filters; silicon; Si; VLSI-P; low power modulators; silicon photonic circuit; tunable filters; very large scale integrated photonics; Optical device fabrication; Optical filters; Optical sensors; Optical waveguides; Phased arrays; Silicon photonics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6989660
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