DocumentCode
1772020
Title
Single exposure wavefront curvature estimation of high harmonic radiation by diffraction from a regular array
Author
Feehan, James S. ; Watts, Hannah M. ; Price, Jonathan H. V. ; Minns, Russell S. ; Brocklesby, William S. ; Frey, Jeremy G.
Author_Institution
Optoelectron. Res. Centre, Univ. of Southampton, Southampton, UK
fYear
2014
fDate
8-13 June 2014
Firstpage
1
Lastpage
2
Abstract
We present a novel technique for estimating the radius of curvature from a single exposure of EUV light from a high harmonic source diffracted by a grating of square apertures.
Keywords
diameter measurement; diffraction gratings; light diffraction; optical arrays; optical harmonic generation; ultraviolet sources; EUV light; high harmonic radiation; radius estimation; single exposure wavefront curvature estimation; square apertures gratings; Apertures; Charge coupled devices; Diffraction; Gratings; Harmonic analysis; Ultraviolet sources; X-ray diffraction;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6989728
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