Title :
Single exposure wavefront curvature estimation of high harmonic radiation by diffraction from a regular array
Author :
Feehan, James S. ; Watts, Hannah M. ; Price, Jonathan H. V. ; Minns, Russell S. ; Brocklesby, William S. ; Frey, Jeremy G.
Author_Institution :
Optoelectron. Res. Centre, Univ. of Southampton, Southampton, UK
Abstract :
We present a novel technique for estimating the radius of curvature from a single exposure of EUV light from a high harmonic source diffracted by a grating of square apertures.
Keywords :
diameter measurement; diffraction gratings; light diffraction; optical arrays; optical harmonic generation; ultraviolet sources; EUV light; high harmonic radiation; radius estimation; single exposure wavefront curvature estimation; square apertures gratings; Apertures; Charge coupled devices; Diffraction; Gratings; Harmonic analysis; Ultraviolet sources; X-ray diffraction;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
