Title :
Silicon chip based near-infrared and mid-infrared optical spectroscopy for volatile organic compound sensing
Author :
Yi Zou ; Chakravarty, Sumit ; Xiaochuan Xu ; Weicheng Lai ; Chen, Ray T.
Author_Institution :
Electr. & Comput. Eng. Dept., Univ. of Texas at Austin, Austin, TX, USA
Abstract :
We compared different on-chip silicon based absorption sensors for the detection of xylene in water in both near-infrared and mid-infrared with detection limit down to 1ppb. Strip waveguide, slot waveguide and PC-based chip integrated optical absorption spectroscopy devices are compared in near-infrared and mid-infrared. The results provide a route for enhanced sensitivity while retaining device miniaturization.
Keywords :
chemical sensors; infrared spectroscopy; organic compounds; silicon; waveguides; PC-based chip integrated optical absorption spectroscopy devices; Si; detection limit; device miniaturization; on-chip silicon based absorption sensors; silicon chip based midinfrared optical spectroscopy; silicon chip based near-infrared optical spectroscopy; slot waveguide; strip waveguide; volatile organic compound sensing; xylene detection; Absorption; Optical sensors; Optical waveguides; Photonic crystals; Sensitivity; Spectroscopy; Strips;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
