Title :
Distributed electrode Mach-Zehnder modulator with double-pass phase shifters and integrated inductors
Author :
Gill, Douglas M. ; Green, William M. J. ; Xiong, Chuan ; Proesel, J. ; Rylyakov, A. ; Schow, Clint ; Rosenberg, Jessie C. ; Barwicz, Tymon ; Khater, M. ; Assefa, Solomon ; Shank, Steven M. ; Reinholm, Carol ; Kiewra, Edward ; Kamlapurkar, Swetha ; Vlasov,
Author_Institution :
IBM T. J. Watson Res. Center, Yorktown Heights, NY, USA
Abstract :
A novel high-speed Mach-Zehnder modulator (MZM) fully integrated into a 90 nm CMOS process is presented. The MZM features `double-pass´ optical phase shifter segments, and the first use of integrated inductors in a `velocity-matched´ distributed-electrode configuration.
Keywords :
CMOS integrated circuits; Mach-Zehnder interferometers; inductors; integrated optics; optical modulation; optical phase shifters; CMOS; distributed electrode Mach-Zehnder modulator; double-pass phase shifters; high-speed Mach-Zehnder modulator; integrated inductors; size 90 nm; velocity-matched distributed-electrode configuration; Electrodes; High-speed optical techniques; Inductors; Integrated optics; Optical waveguides; Phase shifters; Radio frequency;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
