Title :
High excitation efficiency of channel plasmon polaritons in tailored, UV-lithography-defined V-grooves
Author :
Smith, Cameron L. C. ; Thilsted, Anil H. ; Garcia-Ortiz, Cesar E. ; Radko, Ilya P. ; Marie, Rodolphe ; Jeppesen, Claus ; Vannahme, Christoph ; Bozhevolnyi, Sergei I. ; Kristensen, Anders
Author_Institution :
Dept. of Micro- & Nanotechnol., Tech. Univ. of Denmark, Lyngby, Denmark
Abstract :
We demonstrate >50% conversion of light to V-groove channel plasmon-polaritons (CPPs) via compact waveguide-termination mirrors. Devices are fabricated using UV-lithography and crystallographic silicon etching. The V-shape is tailored by thermal oxidation to support confined CPPs.
Keywords :
etching; optical fabrication; optical frequency conversion; optical waveguides; oxidation; photolithography; plasmons; polaritons; Si; UV-lithography-defined V-grooves; V-groove channel plasmon-polaritons; channel plasmon polaritons; compact waveguide-termination mirrors; crystallographic silicon etching; high excitation efficiency; light conversion; tailored V-grooves; thermal oxidation; Mirrors; Optical device fabrication; Optical waveguides; Oxidation; Plasmons; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2014 Conference on
Conference_Location :
San Jose, CA
