SiP design flow and 3D DRC for MEMS

The contribution will describe in detail recent development related to the integration of MEMS into a SiP design flow. A key step in implementing system-level simulation is the translation of the physical behavior of the constitutive components in a system from the more fine-grained continuum level to more abstract, coarse grained models. An important challenge is the preservation of accuracy from fine-grained simulation to a degree that is deemed adequate. In order for the simulator to run in a reasonable time, the system-level model should only include the degrees of freedom (DOF) necessary to capture the relevant physics. Very handy in this sense are methods of model-order reduction (MOR), which under certain conditions enable almost automatic transfer from the continuum level simulation up to the behavioral models with minimal loss of accuracy.