Design, modeling and simulation of CMOS-MEMS resonator for biomedical application

Author

Rabih, A.A.S. ; Dennis, J.O. ; Khir, M. H. Md ; Abdullah, Mohd Ariff

Author_Institution

Dept. of Electr. & Electron. Eng., Univ. Teknol. PETRONAS, Tronoh, Malaysia

fYear

2014

fDate

3-5 June 2014

Firstpage

1

Lastpage

6

Abstract

CMOS-MEMS resonators have found a broad usage in mass sensing applications especially in biomedical field. This paper reports theoretical calculations and Finite Element Method (FEM) simulation for a proposed microresonator for detection of acetone in exhaled breath as biomarker for diabetes. The resonator is 760 μm long and 340 μm wide with 1.461ng effective mass, 21.331 kHz natural resonance frequency, and 8.867 mHz/pg mass sensitivity. Deposition of 4 μm sensitive layer gives 781 μHz/ppm gas concentration sensitivity with minimum concentration detection of 1.28 ppm. The operating voltage of this resonator is below 50 V and the static sensing capacitance is 90.84 fF. Due to the reasonable mass sensitivity of the resonator, it could be used for mass sensing applications.

Keywords

bioMEMS; chemical sensors; diseases; finite element analysis; mass measurement; micromechanical resonators; organic compounds; CMOS-MEMS resonator design; CMOS-MEMS resonator modeling; CMOS-MEMS resonator simulation; FEM simulation; Finite Element Method; acetone detection; biomedical application; biomedical field; capacitance 90.84 fF; diabetes biomarker; exhaled breath; mass sensing applications; mass sensitivity; microresonator; size 340 mum; size 760 mum; static sensing capacitance; theoretical calculations; Capacitance; Damping; Force; Mathematical model; Resonant frequency; Sensitivity; Sensors; CMOS-MEMS; Mass detection; Microresnators; VOC;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent and Advanced Systems (ICIAS), 2014 5th International Conference on

Conference_Location

Kuala Lumpur

Print_ISBN

978-1-4799-4654-9

Type

conf

DOI

10.1109/ICIAS.2014.6869455

Filename

6869455