Title :
Design, modeling and simulation of CMOS-MEMS resonator for biomedical application
Author :
Rabih, A.A.S. ; Dennis, J.O. ; Khir, M. H. Md ; Abdullah, Mohd Ariff
Author_Institution :
Dept. of Electr. & Electron. Eng., Univ. Teknol. PETRONAS, Tronoh, Malaysia
Abstract :
CMOS-MEMS resonators have found a broad usage in mass sensing applications especially in biomedical field. This paper reports theoretical calculations and Finite Element Method (FEM) simulation for a proposed microresonator for detection of acetone in exhaled breath as biomarker for diabetes. The resonator is 760 μm long and 340 μm wide with 1.461ng effective mass, 21.331 kHz natural resonance frequency, and 8.867 mHz/pg mass sensitivity. Deposition of 4 μm sensitive layer gives 781 μHz/ppm gas concentration sensitivity with minimum concentration detection of 1.28 ppm. The operating voltage of this resonator is below 50 V and the static sensing capacitance is 90.84 fF. Due to the reasonable mass sensitivity of the resonator, it could be used for mass sensing applications.
Keywords :
bioMEMS; chemical sensors; diseases; finite element analysis; mass measurement; micromechanical resonators; organic compounds; CMOS-MEMS resonator design; CMOS-MEMS resonator modeling; CMOS-MEMS resonator simulation; FEM simulation; Finite Element Method; acetone detection; biomedical application; biomedical field; capacitance 90.84 fF; diabetes biomarker; exhaled breath; mass sensing applications; mass sensitivity; microresonator; size 340 mum; size 760 mum; static sensing capacitance; theoretical calculations; Capacitance; Damping; Force; Mathematical model; Resonant frequency; Sensitivity; Sensors; CMOS-MEMS; Mass detection; Microresnators; VOC;
Conference_Titel :
Intelligent and Advanced Systems (ICIAS), 2014 5th International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4799-4654-9
DOI :
10.1109/ICIAS.2014.6869455
