Design and modeling of a CMOS-MEMS capacitive resonator based on bonded-dies for gas detection

Author

Gafare, Mawahib ; Dennis, J.O. ; Md Khir, M.H.

Author_Institution

Electr. & Electron. Dept., Univ. Teknol. PETRONAS, Darul Ridzuan, Malaysia

fYear

2014

fDate

3-5 June 2014

Firstpage

1

Lastpage

6

Abstract

This paper presents a capacitive CMOS-MEMS resonator for mass detection. Mass detection is used in many applications such as chemical industries and biomedical diagnosis. The technique used for this work is two dies bonded in parallel direction to get change in the capacitance whenever there is a change in mass and the device is electro-statically actuated. The resonance frequency of the resonator without polymer layer is found to be 17.195 kHz. The mass sensitivity and gas sensitivity are found to be 3.78 μHz/fg and 26.99 μHz/ppb, respectively. The damping ratio is found to be 1.44 in air due to squeeze film damping.

Keywords

CMOS integrated circuits; capacitive sensors; damping; electrostatic actuators; gas sensors; integrated circuit bonding; integrated circuit design; mass measurement; micromechanical resonators; microsensors; radiofrequency integrated circuits; CMOS-MEMS capacitive resonator; biomedical diagnosis; bonded-dies; chemical industry; electrostatic actuator; frequency 17.195 kHz; gas detection; mass detection; polymer layer; squeeze film damping ratio; Capacitance; Damping; Films; Polymers; Resonant frequency; Sensitivity; Sensors; CMOS-MEMS resonator; Mass detection; bonded-dies; capacitive sensor; electrostatically actuation;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent and Advanced Systems (ICIAS), 2014 5th International Conference on

Conference_Location

Kuala Lumpur

Print_ISBN

978-1-4799-4654-9

Type

conf

DOI

10.1109/ICIAS.2014.6869456

Filename

6869456