Title :
Modeling and simulation of two modes of vibration in MEMS devices based on embedded piezoresistors
Author :
Ahmad, Farhan ; Dennis, J.O. ; Bin Md Khir, M. Haris ; Bin Hamid, Nor Hisham ; Yar, Asfand
Author_Institution :
Dept. of Electr. & Electron. Eng., Univ. Teknol. PETRONAS, Tronoh, Malaysia
Abstract :
Piezoresistive effect is commonly used as transduction mechanism in microelectromechanical systems (MEMS) and Wheatstone bridge as readout circuit. This paper presents modeling and simulation of two modes of vibration in the MEMS device through embedded piezoresistors which are arranged in Wheatstone bridge configuration, modeling is extended up to n branches for wide range of applications in MEMS. The comparative analysis of fully and half differential setups even with one variable resistor with balanced form of the two branch bridge is modeled as well as simulated using Multisim8. The sensitivity of the bridge in fully, half and with one variable resistor configuration is found to be 2 μV/mΩ, 1 μV/mΩ and 0.49 μV/mΩ respectively. It is found that fully differential set up is the most sensitive one. This output is amplifiable by using 1000 gain amplifier.
Keywords :
bridge circuits; electronic engineering computing; micromechanical devices; piezoresistive devices; resistors; vibrations; MEMS device; Multisim8 simulation; Wheatstone bridge readout circuit; amplifier; embedded piezoresistor; microelectromechanical system; piezoresistive effect; transduction mechanism; vibration mode; Bridge circuits; Integrated circuit modeling; Micromechanical devices; Piezoresistive devices; Resistors; Sensors; Vibrations; MEMS devices; PZR; Potential divider; Wheatstone bridge; fully differential;
Conference_Titel :
Intelligent and Advanced Systems (ICIAS), 2014 5th International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4799-4654-9
DOI :
10.1109/ICIAS.2014.6869496
