Title :
An ultra-low detection-limit optofluidic biosensor based on Fabry-Pérot cavity
Author :
Pengbo Liu ; Hui Huang ; Tun Cao ; Min Bai ; Haibo Wu ; Xueyu Liu ; Zhenan Tang
Author_Institution :
Dalian Univ. of Tech., Dalian, China
Abstract :
A high quality factor Fabry-Pérot cavity (FPC) with smooth and flat micro-channel surface is realized by using a silicon on insulator substrate, in which the oxide layer functions as an etch-stop layer. And an optofluidic biosensor with integrated dual-channel Fabry-Pérot cavity is proposed for optical differential detection. A detection limit of 5.5×10-8 refractive index unit is experimentally demonstrated, owning to the high quality factor of the cavity and the differential detection, which can extract the small signal for efficient amplification and greatly reduce the system noise.
Keywords :
amplification; biosensors; etching; fluidic devices; microsensors; optical sensors; silicon-on-insulator; FPC; Si; amplification; etch-stop layer; integrated dual-channel Fabry-Pérot cavity; microchannel surface; optical differential detection; oxide layer function; quality factor; refractive index unit; silicon on insulator substrate; system noise reduction; ultralow detection-limit optofluidic biosensor; Biosensors; Cavity resonators; Optical ring resonators; Optical sensors; Silicon; Substrates; Surface treatment;
Conference_Titel :
Control & Automation (ICCA), 11th IEEE International Conference on
Conference_Location :
Taichung
DOI :
10.1109/ICCA.2014.6871105
