Design for 1μbar resolution pressure measurement and display ASIC for MEMS capacitive pressure sensor

This paper proposed the design and implementation of 1μbar resolution pressure measurement AS IC (Application Specific Integrated Circuit) processing circuit for MEMS capacitive pressure sensor using FPAA (Field Programmable Analog Array) and FPGA (Field Programmable Gate Array). AS IC is designed to measure a pressure for altimeter application in the range of -100 mbar to 900 mbar. It has analog signal conditioning circuit and digital processing circuit prototype implemented in FPAA and FPGA respectively. Capacitance to frequency (C-F) conversion technique is used to measure the change in capacitance in MEMS sensor. Simulation of the circuit is carried out in Anadigm tool and Xilinx 6.1. Hardware implementation is carried our using AN231E04 (FPAA) and Xilinx Spartan 3AN (FPGA).