Microsystem design flow for SMEs

Microsystem design includes different domains (e.g. microelectronics, micro mechanics, etc.) and is characterized by multidisciplinarity. Growing demands and complexity result in new challenges for computer-aided microsystem design. Developments from SMEs (small and medium sized enterprises) are often heterogeneous modular-based microsystems associated with collaborations of several companies. The subsystems are often developed and manufactured at different locations before they are integrated into a functional product. This paper presents a computer-aided design flow for modular microsystems´ technology, which takes into account a distributed, collaborative cooperation of several SMEs. This concept includes a generic design flow, which is carried out by different tools to be selected via a flow control. Quality assurance methods have been integrated as well.