Title :
Monte Carlo modeling of stiffness of MEMS membrane
Author :
Kosobutskyy, Petro ; Komarnutskyy, Mykhaylo ; Maj, Cezary ; Zajac, Piotr ; Szermer, Michal ; Zabierowski, Wojciech
Author_Institution :
Dept. of Comput.-Aided Design Syst., Lviv Nat. Polytech. Univ., Lviv, Ukraine
Abstract :
Simulation step is nowadays one of the crucial in the design process of the device. It allows estimating the device performance and reducing the cost of the fabrication process. It is also very useful in statistical approach. As technological process is not ideal and always produce some deviation from established parameters, the final device has variable performance. In this paper, the statistical approach using Monte Carlo modelling is presented in order to estimate the stiffness of a rectangular membrane of various length to width ratio.
Keywords :
Monte Carlo methods; elastic constants; membranes; micromechanical devices; MEMS membrane stiffness; Monte Carlo modeling; membrane length-to-width ratio; microelectromechanical systems; rectangular membrane; simulation step; statistical approach; stiffness estimation; Biomembranes; Monte Carlo methods; Performance evaluation; Silicon; Springs; Standards; Stress; MEMS; Monte Carlo; membrane; stiffness;
Conference_Titel :
Mixed Design of Integrated Circuits & Systems (MIXDES), 2014 Proceedings of the 21st International Conference
Conference_Location :
Lublin
Print_ISBN :
978-83-63578-03-9
DOI :
10.1109/MIXDES.2014.6872163
