DocumentCode :
1777198
Title :
Dual-gated field-effect transistors made from wafer-scale synthetic few-layer molybdenum disulfide
Author :
Tarasov, A. ; Campbell, P.M. ; Tsai, M.-Y. ; Hesabi, Z. ; Feirer, J. ; Graham, Samual ; Ready, William Jud ; Vogel, Eric M.
Author_Institution :
Sch. of Mater. Sci. & Eng., Georgia Inst. of Technol., Atlanta, GA, USA
fYear :
2014
fDate :
22-25 June 2014
Firstpage :
85
Lastpage :
86
Abstract :
Molybdenum disulfide (MoS2) has recently received significant attention because of its interesting thickness-dependent properties and its potential as a semiconducting substitute to graphene [1,2]. Most of the studies so far have focused on small (<; 100 microns) exfoliated MoS2 flakes [1-3]. For manufacturable electronics, it is essential to have large-area material that is compatible with standard fabrication processes for high yield and reproducibility. Though significant progress has been achieved using chemical vapor deposition (CVD) [4,5], the formation of high-quality wafer-scale MoS2 of controlled thickness is still a challenge.
Keywords :
chemical vapour deposition; field effect transistors; molybdenum compounds; CVD; MoS2; chemical vapor deposition; dual-gated field-effect transistors; fabrication processes; high-quality wafer-scale formation; manufacturable electronics; thickness-dependent properties; wafer-scale synthetic few-layer molybdenum disulfide; Contact resistance; Fabrication; Films; Logic gates; Resistance; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Device Research Conference (DRC), 2014 72nd Annual
Conference_Location :
Santa Barbara, CA
Print_ISBN :
978-1-4799-5405-6
Type :
conf
DOI :
10.1109/DRC.2014.6872309
Filename :
6872309
Link To Document :
بازگشت