• DocumentCode
    1777198
  • Title

    Dual-gated field-effect transistors made from wafer-scale synthetic few-layer molybdenum disulfide

  • Author

    Tarasov, A. ; Campbell, P.M. ; Tsai, M.-Y. ; Hesabi, Z. ; Feirer, J. ; Graham, Samual ; Ready, William Jud ; Vogel, Eric M.

  • Author_Institution
    Sch. of Mater. Sci. & Eng., Georgia Inst. of Technol., Atlanta, GA, USA
  • fYear
    2014
  • fDate
    22-25 June 2014
  • Firstpage
    85
  • Lastpage
    86
  • Abstract
    Molybdenum disulfide (MoS2) has recently received significant attention because of its interesting thickness-dependent properties and its potential as a semiconducting substitute to graphene [1,2]. Most of the studies so far have focused on small (<; 100 microns) exfoliated MoS2 flakes [1-3]. For manufacturable electronics, it is essential to have large-area material that is compatible with standard fabrication processes for high yield and reproducibility. Though significant progress has been achieved using chemical vapor deposition (CVD) [4,5], the formation of high-quality wafer-scale MoS2 of controlled thickness is still a challenge.
  • Keywords
    chemical vapour deposition; field effect transistors; molybdenum compounds; CVD; MoS2; chemical vapor deposition; dual-gated field-effect transistors; fabrication processes; high-quality wafer-scale formation; manufacturable electronics; thickness-dependent properties; wafer-scale synthetic few-layer molybdenum disulfide; Contact resistance; Fabrication; Films; Logic gates; Resistance; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference (DRC), 2014 72nd Annual
  • Conference_Location
    Santa Barbara, CA
  • Print_ISBN
    978-1-4799-5405-6
  • Type

    conf

  • DOI
    10.1109/DRC.2014.6872309
  • Filename
    6872309