DocumentCode :
1777307
Title :
Variability of graphene mobility and contacts: Surface effects, doping and strain
Author :
Carrion, Enrique A. ; Wood, Jon D. ; Behman, Ashkan ; Tung, Maryann ; Lyding, Joseph W. ; Pop, Eric
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Illinois, Urbana-Champaign, Urbana, IL, USA
fYear :
2014
fDate :
22-25 June 2014
Firstpage :
199
Lastpage :
200
Abstract :
It is well known that devices based on chemical vapor deposited (CVD) graphene exhibit substantial variability of their electrical properties [1]. However, the sources of such variability and how they might be controlled remain poorly understood. Here, we methodically investigate variability of CVD graphene field-effect transistors (GFETs) transferred with three polymer scaffolds: PMMA, polycarbonate (PC), and a PC/PMMA bilayer (PC in contact with graphene). We find that the polymer/graphene mechanical interaction during transfer and the presence of surface residues induce changes in graphene roughness (up to ~0.2 nm), doping concentrations (up to ~2.5×1012 cm-2) and strain levels (up to ~0.2%) between the polymer scaffolds used. We uncover that a combination of smaller strain and doping from the PC/PMMA scaffolds ultimately yields the lowest variability of contact resistance (Rc) and mobility (μ).
Keywords :
carrier mobility; chemical vapour deposition; contact resistance; doping profiles; field effect transistors; graphene; polymers; surface roughness; C; CVD graphene field-effect transistors; GFET; PC-PMMA bilayer; PC-PMMA scaffolds; chemical vapor deposition; contact resistance; doping concentrations; electrical properties; graphene contacts; graphene mobility; graphene roughness; polycarbonate; polymer scaffolds; polymer-graphene mechanical interaction; strain levels; surface effects; surface roughness;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Device Research Conference (DRC), 2014 72nd Annual
Conference_Location :
Santa Barbara, CA
Print_ISBN :
978-1-4799-5405-6
Type :
conf
DOI :
10.1109/DRC.2014.6872366
Filename :
6872366
Link To Document :
بازگشت