• DocumentCode
    1777307
  • Title

    Variability of graphene mobility and contacts: Surface effects, doping and strain

  • Author

    Carrion, Enrique A. ; Wood, Jon D. ; Behman, Ashkan ; Tung, Maryann ; Lyding, Joseph W. ; Pop, Eric

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Illinois, Urbana-Champaign, Urbana, IL, USA
  • fYear
    2014
  • fDate
    22-25 June 2014
  • Firstpage
    199
  • Lastpage
    200
  • Abstract
    It is well known that devices based on chemical vapor deposited (CVD) graphene exhibit substantial variability of their electrical properties [1]. However, the sources of such variability and how they might be controlled remain poorly understood. Here, we methodically investigate variability of CVD graphene field-effect transistors (GFETs) transferred with three polymer scaffolds: PMMA, polycarbonate (PC), and a PC/PMMA bilayer (PC in contact with graphene). We find that the polymer/graphene mechanical interaction during transfer and the presence of surface residues induce changes in graphene roughness (up to ~0.2 nm), doping concentrations (up to ~2.5×1012 cm-2) and strain levels (up to ~0.2%) between the polymer scaffolds used. We uncover that a combination of smaller strain and doping from the PC/PMMA scaffolds ultimately yields the lowest variability of contact resistance (Rc) and mobility (μ).
  • Keywords
    carrier mobility; chemical vapour deposition; contact resistance; doping profiles; field effect transistors; graphene; polymers; surface roughness; C; CVD graphene field-effect transistors; GFET; PC-PMMA bilayer; PC-PMMA scaffolds; chemical vapor deposition; contact resistance; doping concentrations; electrical properties; graphene contacts; graphene mobility; graphene roughness; polycarbonate; polymer scaffolds; polymer-graphene mechanical interaction; strain levels; surface effects; surface roughness;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference (DRC), 2014 72nd Annual
  • Conference_Location
    Santa Barbara, CA
  • Print_ISBN
    978-1-4799-5405-6
  • Type

    conf

  • DOI
    10.1109/DRC.2014.6872366
  • Filename
    6872366