Title :
Thickness effects of ZnO thin films on flexible ozone sensors
Author :
Acuautla, M. ; Bernardini, S. ; Bendahan, M. ; Pietri, E.
Author_Institution :
Aix - Marseille Univ., Marseille, France
fDate :
June 30 2014-July 3 2014
Abstract :
ZnO nanoparticles thin films were deposited with different thicknesses on Kapton flexible substrates by drop coating method. The flexible platform consists in Ti/Pt interdigitated electrodes for gas detection and a heater device fabricated by Magnetron Sputtering and photolithography process. The thickness effects of the ZnO thin film on the gas sensing properties by ozone exposure at 200 °C has been studied. In order to test a deposit methodology used in large scale industrial production, an ultrasonic spray deposition was done. It was found that the sensitivity towards ozone gas is strongly dependent of the ZnO thin film thicknesses.
Keywords :
II-VI semiconductors; electrochemical electrodes; gas sensors; nanofabrication; nanoparticles; nanosensors; ozone; photolithography; spray coating techniques; sputter deposition; thin film sensors; ultrasonic applications; wide band gap semiconductors; zinc compounds; Kapton flexible substrate; ZnO; drop coating method; gas detection; gas sensing property; heater device; industrial production; interdigitated electrode; magnetron sputtering; nanoparticle thin film deposition; photolithography process; temperature 200 degC; thickness effect; thin film flexible ozone sensor; ultrasonic spray deposition; Films; Gas detectors; Gases; Substrates; Temperature sensors; Zinc oxide; Zinc oxide; flexible substrate; gas sensor; ozone; thin film;
Conference_Titel :
Ph.D. Research in Microelectronics and Electronics (PRIME), 2014 10th Conference on
Conference_Location :
Grenoble
DOI :
10.1109/PRIME.2014.6872703
