Tunable transimpedance sustaining-amplifier for high impedance CMOS-MEMS resonators

Author

Sobreviela, G. ; Uranga, A. ; Barniol, N.

Author_Institution

Dept. of Electron. Eng., Univ. Autonoma de Barcelona, Cerdanyola del Vallés, Spain

fYear

2014

fDate

June 30 2014-July 3 2014

Firstpage

1

Lastpage

4

Abstract

This paper presents a full-custom tunable gain transimpedance amplifier (TIA) designed to work as a sustaining amplifier for a monolithic CMOS-MEMS oscillator. Based on a capacitive detection of the MEMS current, the implemented differential structure allows to compensate a wide range of motional resistances (between 1.4MΩ to 20MΩ) exhibiting an exceptional low input current noise of 32fA/√Hz @ 20 MHz.

Keywords

CMOS analogue integrated circuits; circuit tuning; micromechanical resonators; operational amplifiers; oscillators; TIA; capacitive detection; differential structure; exceptional low input current noise; full-custom tunable gain transimpedance amplifier; high impedance CMOS-MEMS resonators; monolithic CMOS-MEMS oscillator; motional resistances; resistance 1.4 Mohm to 20 Mohm; tunable transimpedance sustaining-amplifier; Capacitance; Gain; Micromechanical devices; Noise; Oscillators; Resistance; Resonant frequency; CMOS-MEMS; MEMS-based Oscillatorr; Radio-Frequency MEMS;

fLanguage

English

Publisher

ieee

Conference_Titel

Ph.D. Research in Microelectronics and Electronics (PRIME), 2014 10th Conference on

Conference_Location

Grenoble

Type

conf

DOI

10.1109/PRIME.2014.6872735

Filename

6872735