Title :
Impact of enhanced contact doping on minority carriers diffusion currents
Author :
Stefanucci, Camillo ; Buccella, Pietro ; Kayal, Maher ; Sallese, Jean Michel
Author_Institution :
Swiss Fed. Inst. of Technol. (EPFL), Lausanne, Switzerland
fDate :
June 30 2014-July 3 2014
Abstract :
Minority carriers diffusion currents are particularly important in parasitic substrate couplings of Smart Power ICs. In CMOS technologies the P-substrate potential is imposed by P+ contacts and N-wells by N+ highly doped implantations. The doping concentration discontinuity of these contact regions can have a big impact on parasitic diffusion currents of minority carriers. This work gives a description of these effects by device physical simulations of PN junctions under different injection levels of minority carriers. The perturbation of boundary conditions for electrons diffusion is also studied inside the substrate bulk in case a highly-doped substrate is used for high-voltage technologies.
Keywords :
CMOS integrated circuits; ion implantation; minority carriers; power integrated circuits; semiconductor doping; CMOS technology; N+ highly doped implantations; N-wells; P+ contacts; P-substrate potential; PN junctions; boundary condition perturbation; contact regions; device physical simulations; doping concentration discontinuity; electron diffusion; enhanced contact doping; high-voltage technology; highly-doped substrate; injection levels; minority carrier diffusion currents; parasitic diffusion currents; parasitic substrate couplings; smart power ICs; substrate bulk; Boundary conditions; Couplings; Doping; Integrated circuit modeling; Junctions; Semiconductor process modeling; Substrates;
Conference_Titel :
Ph.D. Research in Microelectronics and Electronics (PRIME), 2014 10th Conference on
Conference_Location :
Grenoble
DOI :
10.1109/PRIME.2014.6872738