Title :
Calculation and experimental analysis of micromirror rotation angle
Author :
Timoshenkov, S. ; Evstafyev, S. ; Britkov, I. ; Artemov, E.
Author_Institution :
Microelectron. Dept., Nat. Res. Univ. of Electron. Technol., Moscow, Russia
Abstract :
Research and development results of micromirror matrix based on thermomechanical actuators have been shown. Methodology for calculating the thermomechanical deformation of the actuator under heating has been proposed. Also system that helped to define the relation between the angle of rotation of individual elements of the micromirror matrix and temperature overheating have been developed and described.
Keywords :
actuators; angular measurement; deformation; micro-optomechanical devices; micromirrors; micromirror matrix; micromirror rotation angle; temperature overheating; thermomechanical actuators; thermomechanical deformation; Actuators; Force; Heating; Micromirrors; Structural beams; Temperature measurement; MOEMS; micromirror matrix; thermomechanical actuator;
Conference_Titel :
Electronics and Nanotechnology (ELNANO), 2014 IEEE 34th International Conference on
Conference_Location :
Kyiv
Print_ISBN :
978-1-4799-4581-8
DOI :
10.1109/ELNANO.2014.6873953
