Study of optical and mechanical resonances in indium oxide microrods

Indium oxide microrods with rectangular or hexagonal cross-sections have been grown by a catalyst free evaporation deposition method. Their luminescence properties have been investigated as well as whispering gallery resonances with improved Q-factor have been demonstrated for hexagonal and square cross-section rods. Electric field induced mechanical resonance of the microrods has been investigated by in-situ measurements in a scanning electron microscope (SEM). Young´s moduli of rods with different cross-sectional shapes have been determined from the measured resonance frequencies. Q factors in the range 1180-3780 obtained from the amplitude-frequency curves show that the In₂O₃ microrods are suitable as micromechanical resonators.