Title :
Extraction of GeSn absorption coefficients from photodetector response
Author :
Kaiheng Ye ; Wogong Zhang ; Oehme, Michael ; Schmid, Maurizio ; Gollhofer, Martin ; Kostecki, Konrad ; Widmann, Daniel ; Kasper, Erich ; Schulze, J.
Author_Institution :
Insitute for Semicond. Eng., Univ. of Stuttgart, Stuttgart, Germany
Abstract :
Germanium tin (GeSn) shifts the photo-response of infrared (IR) light detectors from a typical cutoff wavelength of Ge detectors of 1550nm toward the mid infrared (MIR) [1]. The determination of the optical absorption coefficient of GeSn is difficult because it requires both high grade GeSn material and appropriate measurement structure. A series of vertical pin photodetector with the absorber material GeSn of excellent quality were fabricated achieving quantitative extraction of the absorption coefficient from photo-response. In this paper the fabrication of vertical GeSn photodetectors, the measurement of the background doping level in the intrinsic region (i-region) and the determination of the absorption coefficient are presented and the influence of high doped contact layers and electro-absorption effects from the built-in electric field are discussed.
Keywords :
absorption coefficients; germanium alloys; photodetectors; semiconductor doping; tin alloys; GeSn; absorption coefficients; background doping level; built-in electric field; electro-absorption effects; high doped contact layers; intrinsic region; photodetector response; vertical GeSn photodetectors; Absorption; Doping; Materials; Optical reflection; Optical variables measurement; Photodetectors; Tin;
Conference_Titel :
Silicon-Germanium Technology and Device Meeting (ISTDM), 2014 7th International
Conference_Location :
Singapore
Print_ISBN :
978-1-4799-5427-8
DOI :
10.1109/ISTDM.2014.6874643