Title :
Automated Micro Hall Effect measurements
Author :
Petersen, Dirch Hjorth ; Henrichsen, Henrik Hartmann ; Rong Lin ; Nielsen, Peter Folmer ; Hansen, Ole
Author_Institution :
Dept. of Micro & Nanotechnol., Tech. Univ. of Denmark, Lyngby, Denmark
Abstract :
With increasing complexity of processes and variety of materials used for semiconductor devices, stringent control of the electronic properties is becoming ever more relevant. Collinear micro four-point probe (M4PP) based measurement systems have become high-end metrology methods for characterization and monitoring of sheet resistance as well as sheet carrier density and mobility via the Micro Hall Effect (MHE) method.
Keywords :
Hall effect; carrier density; carrier mobility; electrical resistivity; semiconductor materials; automated microHall effect measurements; collinear microfour-point probe based measurement systems; electronic properties; semiconductor devices; sheet carrier density; sheet carrier mobility; sheet resistance; Buildings; Conferences; Educational institutions; Electrodes; Resistance; Sensitivity; System-on-chip;
Conference_Titel :
Silicon-Germanium Technology and Device Meeting (ISTDM), 2014 7th International
Conference_Location :
Singapore
Print_ISBN :
978-1-4799-5427-8
DOI :
10.1109/ISTDM.2014.6874677
