DocumentCode
1779269
Title
Automated Micro Hall Effect measurements
Author
Petersen, Dirch Hjorth ; Henrichsen, Henrik Hartmann ; Rong Lin ; Nielsen, Peter Folmer ; Hansen, Ole
Author_Institution
Dept. of Micro & Nanotechnol., Tech. Univ. of Denmark, Lyngby, Denmark
fYear
2014
fDate
2-4 June 2014
Firstpage
37
Lastpage
38
Abstract
With increasing complexity of processes and variety of materials used for semiconductor devices, stringent control of the electronic properties is becoming ever more relevant. Collinear micro four-point probe (M4PP) based measurement systems have become high-end metrology methods for characterization and monitoring of sheet resistance as well as sheet carrier density and mobility via the Micro Hall Effect (MHE) method.
Keywords
Hall effect; carrier density; carrier mobility; electrical resistivity; semiconductor materials; automated microHall effect measurements; collinear microfour-point probe based measurement systems; electronic properties; semiconductor devices; sheet carrier density; sheet carrier mobility; sheet resistance; Buildings; Conferences; Educational institutions; Electrodes; Resistance; Sensitivity; System-on-chip;
fLanguage
English
Publisher
ieee
Conference_Titel
Silicon-Germanium Technology and Device Meeting (ISTDM), 2014 7th International
Conference_Location
Singapore
Print_ISBN
978-1-4799-5427-8
Type
conf
DOI
10.1109/ISTDM.2014.6874677
Filename
6874677
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