Title :
Characterization of electronic charged states of self-aligned coupled Si quantum dots by AFM/KFM probe technique
Author :
Makihara, Katsunori ; Tsunekawa, Naoki ; Ikeda, Makoto ; Miyazaki, S.
Author_Institution :
Grad. Sch. of Eng., Nagoya Univ., Nagoya, Japan
Abstract :
Electronic charged states of self-aligned coupled silicon quantum dots are investigated in this study using atomic force microscopy/Kelvin probe microscopy. Spatially-controlled charging characteristics of the quantum dot are studied. Results show that the temporal change in surface potential after electron injection is due to electron transfer in the quantum dot.
Keywords :
atomic force microscopy; elemental semiconductors; semiconductor quantum dots; silicon; surface charging; surface potential; AFM probe; KFM probe; Kelvin probe microscopy; Si; atomic force microscopy; electron injection; electron transfer; electronic charged states; self-aligned coupled silicon quantum dots; spatially-controlled charging; surface potential; Decision support systems; Three-dimensional displays;
Conference_Titel :
Silicon-Germanium Technology and Device Meeting (ISTDM), 2014 7th International
Conference_Location :
Singapore
Print_ISBN :
978-1-4799-5427-8
DOI :
10.1109/ISTDM.2014.6874681
