Title :
In-situ measurement of wafer camber by a laser-feedback detector
Author :
Tambosso, Tiziana ; Donati, Silvano ; Ray-Hua Horng
Author_Institution :
Dept. of Electron. Dacun, Da Yeh Univ., Changhua, Taiwan
Abstract :
Using a laser diode as an echo detector of the optical reflection from a wafer surface, we demonstrate a very compact and extremely simple optical probe capable of measuring the curvature radius of a wafer, inside an MOCVD chamber, on the range from a few meters to about 10 km.
Keywords :
MOCVD; echo; laser feedback; measurement by laser beam; reflectivity; semiconductor lasers; MOCVD chamber; curvature radius; echo detector; in-situ measurement; laser diode; laser-feedback detector; optical reflection; wafer camber; wafer surface; Detectors; Laser beams; Measurement by laser beam; Optical interferometry; Optical variables measurement; Substrates; Surface emitting lasers; curvature measurement; proflometry; self-mixing interferometry; wafer characterization;
Conference_Titel :
Photonics Conference (IPC), 2014 IEEE
Conference_Location :
San Diego, CA
DOI :
10.1109/IPCon.2014.6995397
