TEOS plasma polymerized films: Impact of clustered material in humidity measurement

Author

Hernandez, L.F. ; da Silva, M.L.P. ; Lima, R.R. ; Cardoso, V.F.

Author_Institution

Dept. of Electron. Syst., CEETEPS, Sao Paulo, Brazil

fYear

2014

fDate

15-18 Oct. 2014

Firstpage

1

Lastpage

4

Abstract

This work aims to humidity and VOCs measurement using TEOS films or TEOS/HFE composites. Films, exposed or not to ultraviolet, were tested on cycles of relative humidity ranging from 25% to 85% and VOCs interference were also evaluated. TEOS films showed good reproducibility up to 85% relative humidity but quick reaction on 90%. The best detection limit was 100 ppm, using TEOS films exposed to UVC and TEOS/HFE composites show sensitivity of 4 Hz/% humidity, but interdigitated electrodes quickly saturate. VOCs were detected in the 1% w/w in air and do not interfere in the relative humidity detection.

Keywords

chemical sensors; chemical variables measurement; humidity measurement; polymer films; polymerisation; thin film sensors; TEOS plasma polymerized film; TEOS-HFE composite; UVC; VOC detection; VOC interference; VOC measurement; clustered material impact; humidity measurement; interdigitated electrode; relative humidity detection; tetraethoxysilane; Electrodes; Films; Humidity; Humidity measurement; Plasmas; Polymers; Sensitivity; HFE; TEOS; VOCs; humidity; plasma;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors (IBERSENSOR), 2014 IEEE 9th Ibero-American Congress on

Conference_Location

Bogota

Print_ISBN

978-1-4799-6835-0

Type

conf

DOI

10.1109/IBERSENSOR.2014.6995509

Filename

6995509