Title :
An experimental research of love wave sensor based on LiTaO3/SiO2 structure
Author :
Gui Chen ; Xiao Xie ; Wen Wang ; Shitang He
Author_Institution :
Dept. of Eng. Mech., Inst. of Acoust., Beijing, China
fDate :
Oct. 30 2014-Nov. 2 2014
Abstract :
Temperature characteristics of SiO2-coated Love Wave oscillators are presented from 10 °C to 60 °C. Surface skimming bulk wave (SSBW) and Love Wave delay line devices were fabricated on the 36 °YX-LiTaO3 substrate. Near zero TCF of SiO2-coated Love Wave oscillators from 10 °C to 60 °C are demonstrated in the 150MHz range. In the gas sensor experiment on dimethylmethylphosphonate (DMMP) detection, the fabricated SXFA-coated chemical sensor exhibited a threshold detection limit and high sensitivity.
Keywords :
Love waves; bulk acoustic wave devices; gas sensors; organic compounds; silicon compounds; surface acoustic wave delay lines; surface acoustic wave oscillators; LiTaO3-SiO2; Love wave delay line devices; Love wave sensor; SXFA-coated chemical sensor; SiO2-coated Love wave oscillators; Surface skimming bulk wave delay line devices; dimethylmethylphosphonate detection; frequency 150 MHz; gas sensor; temperature 10 degC to 60 degC; temperature characteristics; threshold detection limit; Delay lines; Gas detectors; Oscillators; Temperature; Temperature measurement; Temperature sensors; Thermal stability; 36 °YX LiTaO3; Frequency response; SiO2; Temperature characteristics;
Conference_Titel :
Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA), 2014 Symposium on
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-6424-6
DOI :
10.1109/SPAWDA.2014.6996811
