DocumentCode
1781465
Title
An experimental research of love wave sensor based on LiTaO3 /SiO2 structure
Author
Gui Chen ; Xiao Xie ; Wen Wang ; Shitang He
Author_Institution
Dept. of Eng. Mech., Inst. of Acoust., Beijing, China
fYear
2014
fDate
Oct. 30 2014-Nov. 2 2014
Firstpage
1
Lastpage
4
Abstract
Temperature characteristics of SiO2-coated Love Wave oscillators are presented from 10 °C to 60 °C. Surface skimming bulk wave (SSBW) and Love Wave delay line devices were fabricated on the 36 °YX-LiTaO3 substrate. Near zero TCF of SiO2-coated Love Wave oscillators from 10 °C to 60 °C are demonstrated in the 150MHz range. In the gas sensor experiment on dimethylmethylphosphonate (DMMP) detection, the fabricated SXFA-coated chemical sensor exhibited a threshold detection limit and high sensitivity.
Keywords
Love waves; bulk acoustic wave devices; gas sensors; organic compounds; silicon compounds; surface acoustic wave delay lines; surface acoustic wave oscillators; LiTaO3-SiO2; Love wave delay line devices; Love wave sensor; SXFA-coated chemical sensor; SiO2-coated Love wave oscillators; Surface skimming bulk wave delay line devices; dimethylmethylphosphonate detection; frequency 150 MHz; gas sensor; temperature 10 degC to 60 degC; temperature characteristics; threshold detection limit; Delay lines; Gas detectors; Oscillators; Temperature; Temperature measurement; Temperature sensors; Thermal stability; 36 °YX LiTaO3 ; Frequency response; SiO2 ; Temperature characteristics;
fLanguage
English
Publisher
ieee
Conference_Titel
Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA), 2014 Symposium on
Conference_Location
Beijing
Print_ISBN
978-1-4799-6424-6
Type
conf
DOI
10.1109/SPAWDA.2014.6996811
Filename
6996811
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