Title :
Focused femtosecond laser pulses: A versatile tool for three-dimensional writing of micro-nano devices
Author :
Eaton, Shane M. ; Criante, Luigino ; Turco, Sara Lo ; Guduru, Surya S. K. ; Ramponi, Roberta
Author_Institution :
Dipt. di Fis., Politec. di Milano, Milan, Italy
Abstract :
Femtosecond laser microfabrication is a versatile method able to form surface ablated features in any material, buried waveguides and microchannels in transparent glasses, and 3D microstructures in photoresists via two photon polymerization. In this paper, we describe the fundamentals of each of these three important modalities of the femtosecond laser micromachining method and present several novel devices that have application in lab on a chip, biosensing and display industries.
Keywords :
high-speed optical techniques; laser beam machining; micromachining; biosensing; display industries; femtosecond laser micromachining; focused femtosecond laser pulses; lab on a chip; microdevices; nanodevices; three-dimensional writing; Etching; Laser ablation; Microchannels; Optical surface waves; Surface emitting lasers; Ultrafast optics; Waveguide lasers; femtosecond laser; glasses; micromachining; polymers; two photon polymerization;
Conference_Titel :
Transparent Optical Networks (ICTON), 2014 16th International Conference on
Conference_Location :
Graz
DOI :
10.1109/ICTON.2014.6876298
