Title :
Vickers microhardness of oxidized and nonoxidized porous silicon
Author :
Rahmoun, K. ; Iost, A. ; Keryvin, V. ; Guillemot, G. ; Sangleboeuf, J.C. ; Guendouz, M. ; Haji, L.
Author_Institution :
Unite de Rech. Mater. et Energies Renouvelables URMER, Univ. of Tlemcen, Tlemcen, Algeria
Abstract :
In this work we present our recent investigation on characterizing mechanical properties of porous silicon (PS) by using instrumented micro-indentation. Hardness and elastic modulus for oxidized and nonoxidized PS were measured. Experimental results revealed that hardness and elastic modulus are significantly lower than that of silicon substrate and decrease with increasing porosities. After oxidation an increase of the hardness and elastic modulus were observed. The task of stabilization of PS mechanical parameters can be solved with the help of oxidation.
Keywords :
Vickers hardness; elastic moduli; elemental semiconductors; indentation; microhardness; oxidation; porosity; porous semiconductors; silicon; Si; Vickers microhardness; elastic modulus; instrumented microindentation; mechanical parameter; mechanical properties; nonoxidized porous silicon; oxidation; oxidized porous silicon; porosity; silicon substrate; Films; Mechanical factors; Oxidation; Scanning electron microscopy; Silicon; Substrates; Elastic modulus; Microhardness; Oxidation; Porous silicon; Vickers indentation;
Conference_Titel :
Dielectric Materials for Photovoltaic Systems (NAWDMPV), 2014 North African Workshop on
Conference_Location :
Tlemcen
Print_ISBN :
978-1-4799-6502-1
DOI :
10.1109/NAWDMPV.2014.6997620
