Implementation and experimental evaluation of PIS control for suppression of flow disturbance to pneumatic vibration isolators

This paper considers the implementation of a proportional-integral-sinusoidal (PIS) control scheme for pneumatic vibration isolators. In this scheme, a sinusoidal compensator (S compensator), which generates a sinusoidal signal, is used to suppress flow disturbance. However, when the S compensator starts up, the vibration of an isolation table occurs. To overcome the issue, a soft switching approach is employed. Moreover, residual high-frequency vibration is attenuated by means of a phase-lead type PIS compensator. The effectiveness of the proposed methods is verified by experiments.