• DocumentCode
    1784071
  • Title

    Microaccelerometer based on surface acoustic waves

  • Author

    Lukyanov, D. ; Shevchenko, S. ; Kukaev, A. ; Filippova, E. ; Safronov, D.

  • fYear
    2014
  • fDate
    Oct. 30 2014-Nov. 2 2014
  • Firstpage
    18
  • Lastpage
    21
  • Abstract
    This paper proposes an idea of an accelerometer based on surface acoustic waves. Such devices should be able to survive high shocks (up to 65 000 g) and still be small, energy efficient and low-cost. Theory basics, design concepts, experimental and modeling results are discussed.
  • Keywords
    accelerometers; microsensors; surface acoustic wave devices; surface acoustic waves; microaccelerometer; surface acoustic waves; Acceleration; Accelerometers; Packaging; Resonant frequency; Surface acoustic wave devices; Surface acoustic waves; Micromechanical accelerometer (MMA); Quartz packaging; Surface acoustic wave (SAW);
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA), 2014 Symposium on
  • Conference_Location
    Beijing
  • Print_ISBN
    978-1-4799-6424-6
  • Type

    conf

  • DOI
    10.1109/SPAWDA.2014.6998515
  • Filename
    6998515
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1784071