Title :
Microaccelerometer based on surface acoustic waves
Author :
Lukyanov, D. ; Shevchenko, S. ; Kukaev, A. ; Filippova, E. ; Safronov, D.
fDate :
Oct. 30 2014-Nov. 2 2014
Abstract :
This paper proposes an idea of an accelerometer based on surface acoustic waves. Such devices should be able to survive high shocks (up to 65 000 g) and still be small, energy efficient and low-cost. Theory basics, design concepts, experimental and modeling results are discussed.
Keywords :
accelerometers; microsensors; surface acoustic wave devices; surface acoustic waves; microaccelerometer; surface acoustic waves; Acceleration; Accelerometers; Packaging; Resonant frequency; Surface acoustic wave devices; Surface acoustic waves; Micromechanical accelerometer (MMA); Quartz packaging; Surface acoustic wave (SAW);
Conference_Titel :
Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA), 2014 Symposium on
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-6424-6
DOI :
10.1109/SPAWDA.2014.6998515
