Title :
Determination of elastic properties of surface layers and coatings
Author :
Sevcik, M. ; Husak, M.
Author_Institution :
Dept. of Microelectron., CTU in Prague, Prague, Czech Republic
Abstract :
This paper shows determination of elastic constants of thin layers deposited on substrates. Resonant ultrasound spectroscopy is used to measure resonant spectras before and after layer deposition. These two spectra are compared and changes in the position of the resonant peaks are associated with layer properties. For thin layers either the elastic moduli or the surface mass density can be determined, providing the complementary information.
Keywords :
coatings; elastic constants; elastic moduli; thin films; ultrasonic velocity; coatings; elastic constants; elastic moduli; elastic properties; layer deposition; resonant ultrasound spectroscopy; surface layers; surface mass density; thin layers; Spectroscopy; Substrates; Surface acoustic waves; Surface treatment; Ultrasonic imaging; Ultrasonic variables measurement;
Conference_Titel :
Advanced Semiconductor Devices & Microsystems (ASDAM), 2014 10th International Conference on
Conference_Location :
Smolenice
Print_ISBN :
978-1-4799-5474-2
DOI :
10.1109/ASDAM.2014.6998648
