• DocumentCode
    1784397
  • Title

    Simulation of distributed MOEMS for smart environments

  • Author

    Shakhnov, V.A. ; Zinchenko, L.A. ; Kosolapov, I.A.

  • Author_Institution
    Bauman Moscow State Tech. Univ., Moscow, Russia
  • fYear
    2014
  • fDate
    20-22 Oct. 2014
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Smart environments require a huge number of sensors and actuators that interact and transfer information from the physical world to a virtual reality. In the paper, we discuss approaches to computer-aided simulation of distributed microsystems. Our focus is on micro-opto-electromechanical systems (MOEMS) that are based on a combination of optical, mechanical and electrical effects. Technological uncertainties result in the change of MOEMS output characteristics and can result in incorrect data transfer from the physical world to a virtual reality. We discuss our experimental results for distributed MOEMS. Finally, we make conclusions about supporting collaboration in smart environments with distributed MOEMS.
  • Keywords
    CAD; micro-optomechanical devices; optical engineering computing; virtual reality; computer-aided simulation; distributed MOEMS; distributed microsystems; microopto-electromechanical systems; smart environments; virtual reality; Adaptive optics; Finite element analysis; Mathematical model; Optical interferometry; Sensors; Solid modeling; Uncertainty;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices & Microsystems (ASDAM), 2014 10th International Conference on
  • Conference_Location
    Smolenice
  • Print_ISBN
    978-1-4799-5474-2
  • Type

    conf

  • DOI
    10.1109/ASDAM.2014.6998679
  • Filename
    6998679