Title :
Simulation of distributed MOEMS for smart environments
Author :
Shakhnov, V.A. ; Zinchenko, L.A. ; Kosolapov, I.A.
Author_Institution :
Bauman Moscow State Tech. Univ., Moscow, Russia
Abstract :
Smart environments require a huge number of sensors and actuators that interact and transfer information from the physical world to a virtual reality. In the paper, we discuss approaches to computer-aided simulation of distributed microsystems. Our focus is on micro-opto-electromechanical systems (MOEMS) that are based on a combination of optical, mechanical and electrical effects. Technological uncertainties result in the change of MOEMS output characteristics and can result in incorrect data transfer from the physical world to a virtual reality. We discuss our experimental results for distributed MOEMS. Finally, we make conclusions about supporting collaboration in smart environments with distributed MOEMS.
Keywords :
CAD; micro-optomechanical devices; optical engineering computing; virtual reality; computer-aided simulation; distributed MOEMS; distributed microsystems; microopto-electromechanical systems; smart environments; virtual reality; Adaptive optics; Finite element analysis; Mathematical model; Optical interferometry; Sensors; Solid modeling; Uncertainty;
Conference_Titel :
Advanced Semiconductor Devices & Microsystems (ASDAM), 2014 10th International Conference on
Conference_Location :
Smolenice
Print_ISBN :
978-1-4799-5474-2
DOI :
10.1109/ASDAM.2014.6998679