DocumentCode
1784405
Title
Energy harvesting in 3D
Author
Janicek, V.
Author_Institution
Dept. of Microelectron., FEE CTU in Prague, Prague, Czech Republic
fYear
2014
fDate
20-22 Oct. 2014
Firstpage
1
Lastpage
4
Abstract
This paper describes the design and evaluation of 3D electrostatic energy harvester. It is based on electrostatic converter and uses the principle of conversion of non-electric energy into electrical energy by periodical modification of gap between electrodes of a capacitor. The structure is designed and modelled as three-dimensional silicon based MEMS. Innovative approach made it possible to reach very low resonant frequency of approx. 100 Hz. A modified long cantilever damping spring design has been used. The structure can move in all 3 axes of coordinate system and can be mechanically tuned to reach desired parameters.
Keywords
cantilevers; electrostatic devices; energy harvesting; springs (mechanical); 3D electrostatic energy harvester; electrostatic converter; long cantilever damping spring design; resonant frequency; three-dimensional silicon based MEMS; Electrodes; Electrostatics; Generators; Micromechanical devices; Suspensions; Topology; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices & Microsystems (ASDAM), 2014 10th International Conference on
Conference_Location
Smolenice
Print_ISBN
978-1-4799-5474-2
Type
conf
DOI
10.1109/ASDAM.2014.6998684
Filename
6998684
Link To Document