Title :
Energy harvesting in 3D
Author_Institution :
Dept. of Microelectron., FEE CTU in Prague, Prague, Czech Republic
Abstract :
This paper describes the design and evaluation of 3D electrostatic energy harvester. It is based on electrostatic converter and uses the principle of conversion of non-electric energy into electrical energy by periodical modification of gap between electrodes of a capacitor. The structure is designed and modelled as three-dimensional silicon based MEMS. Innovative approach made it possible to reach very low resonant frequency of approx. 100 Hz. A modified long cantilever damping spring design has been used. The structure can move in all 3 axes of coordinate system and can be mechanically tuned to reach desired parameters.
Keywords :
cantilevers; electrostatic devices; energy harvesting; springs (mechanical); 3D electrostatic energy harvester; electrostatic converter; long cantilever damping spring design; resonant frequency; three-dimensional silicon based MEMS; Electrodes; Electrostatics; Generators; Micromechanical devices; Suspensions; Topology; Vibrations;
Conference_Titel :
Advanced Semiconductor Devices & Microsystems (ASDAM), 2014 10th International Conference on
Conference_Location :
Smolenice
Print_ISBN :
978-1-4799-5474-2
DOI :
10.1109/ASDAM.2014.6998684
