Design optimization of bistable modules electrothermally actuated for digital microrobotics

This article deals with the optimization of the main element of a digital microrobot, which is a bistable module. the bistable module consists of curved beams and electrothermal actuators. A design study of the curved beam and the electrothermal actuator is presented in order to achieve the limits in line with miniaturization. Finally, An optimization for the dimensions is proposed respect to microfabrication and elastic limits.