Title :
Nonlinear dynamics of electrostatically actuated micro-resonator: Analytical solution by homotopy perturbation method
Author :
Tajaddodianfar, Farid ; Yazdi, Mohammadreza Hairi ; Pishkenari, Hossein Nejat ; Miandoab, Ehsan Maani
Author_Institution :
Dept. of Mech. Eng., Univ. of Tehran, Tehran, Iran
Abstract :
Dynamic behavior of a electrostatically actuated MEMS resonator is investigated. A double clamped micro-beam under distributed DC and AC actuation is used. Corresponding single degree of freedom model is derived using Galerkin´s decomposition method. Homotopy Perturbation Method (HPM) is implemented in order to derive analytical expression for frequency response of the micro-resonator. Comparison of the obtained results with the numerical simulations confirms that HPM agrees very well with numerical simulations for a wide range of parameters. Obtained analytical solution can be used for design and optimization of MEMS resonators.
Keywords :
Galerkin method; electrostatic actuators; micromechanical resonators; perturbation techniques; Galerkin decomposition method; HPM; distributed AC actuation; distributed DC actuation; double clamped microbeam; electrostatically actuated MEMS resonator; electrostatically actuated microresonator; frequency response; homotopy perturbation method; nonlinear dynamics; Educational institutions; Equations; Mathematical model; Micromechanical devices; Numerical simulation; Perturbation methods; Vibrations;
Conference_Titel :
Advanced Intelligent Mechatronics (AIM), 2014 IEEE/ASME International Conference on
Conference_Location :
Besacon
DOI :
10.1109/AIM.2014.6878259
