Nonlinear dynamics of electrostatically actuated micro-resonator: Analytical solution by homotopy perturbation method

Author

Tajaddodianfar, Farid ; Yazdi, Mohammadreza Hairi ; Pishkenari, Hossein Nejat ; Miandoab, Ehsan Maani

Author_Institution

Dept. of Mech. Eng., Univ. of Tehran, Tehran, Iran

fYear

2014

fDate

8-11 July 2014

Firstpage

1284

Lastpage

1289

Abstract

Dynamic behavior of a electrostatically actuated MEMS resonator is investigated. A double clamped micro-beam under distributed DC and AC actuation is used. Corresponding single degree of freedom model is derived using Galerkin´s decomposition method. Homotopy Perturbation Method (HPM) is implemented in order to derive analytical expression for frequency response of the micro-resonator. Comparison of the obtained results with the numerical simulations confirms that HPM agrees very well with numerical simulations for a wide range of parameters. Obtained analytical solution can be used for design and optimization of MEMS resonators.

Keywords

Galerkin method; electrostatic actuators; micromechanical resonators; perturbation techniques; Galerkin decomposition method; HPM; distributed AC actuation; distributed DC actuation; double clamped microbeam; electrostatically actuated MEMS resonator; electrostatically actuated microresonator; frequency response; homotopy perturbation method; nonlinear dynamics; Educational institutions; Equations; Mathematical model; Micromechanical devices; Numerical simulation; Perturbation methods; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Intelligent Mechatronics (AIM), 2014 IEEE/ASME International Conference on

Conference_Location

Besacon

Type

conf

DOI

10.1109/AIM.2014.6878259

Filename

6878259