Title :
Sensitivity and long-term stability of γ-Fe2O3 and CoFe2O4 nanoparticle gas sensors for NO2, CO and acetone sensing — A comparative study
Author :
Luby, S. ; Jergel, M. ; Benkovicova, M. ; Siffalovic, P. ; Ivanco, J. ; Vegso, K. ; Majkova, E. ; Rella, R. ; Manera, M.G. ; Capone, S. ; Vavra, I.
Author_Institution :
Inst. of Phys. SAS, Bratislava, Slovakia
Abstract :
Gas sensors based on γ-Fe2O3 and CoFe2O4 nanoparticles (NPs) were prepared by Langmuir-Schaeffer deposition onto Al2O3 and auxilliary Si substrates. NPs with the size of 6.4 nm (Fe2O3) and 7.6 nm (CoFe2O4) and polydispersity of 9 % were fabricated by chemical route. NP arrays were analyzed by GIXRD, SEM, TEM, DLS and ellipsometry. Fe2O3 sensors show high response of 38 for 500 ppb of strongly oxidizing NO2. The response of CoFe2O4 sensors is 10 at 5 ppm of NO2. Sensitivities are lower with reducing CO and acetone gases. After one year storage at room temperature, a 6 % decrease of response was found. The sensor sensitivities are discussed comparing with the best published results so far.
Keywords :
X-ray diffraction; carbon compounds; cobalt compounds; ellipsometry; gas sensors; iron compounds; nanofabrication; nanoparticles; nanosensors; nitrogen compounds; organic compounds; oxidation; scanning electron microscopy; transmission electron microscopy; CO; CoFe2O4; DLS; Fe2O3; GIXRD; Langmuir-Schaeffer deposition; NO2; NP array; SEM; TEM; auxilliary Si substrate; ellipsometry; nanoparticle gas sensor; oxidization; polydispersity; size 6.4 nm; size 7.6 nm; stability; temperature 293 K to 298 K; Actuators; Current measurement; Gas detectors; Substrates; Temperature sensors; Thermal stability;
Conference_Titel :
Advanced Semiconductor Devices & Microsystems (ASDAM), 2014 10th International Conference on
Conference_Location :
Smolenice
Print_ISBN :
978-1-4799-5474-2
DOI :
10.1109/ASDAM.2014.6998691
