Title :
Planar waveguide based structures for integrated optics on PDMS
Author :
Jandura, D. ; Pudis, D. ; Slabeyciusova, S. ; Durisova, J.
Author_Institution :
Dept. of Phys., Univ. of Zilina, Zilina, Slovakia
Abstract :
In this paper, the fabrication technology for planar waveguide structures and devices in polydimethylsiloxane (PDMS) is presented. Direct laser writing was used to prepare pattern master in photoresist layer. In the next step, channel waveguide and ring resonator structures were imprinted in PDMS material. Finally, morphological properties of prepared waveguide structures were investigated by atomic force microscopy.
Keywords :
atomic force microscopy; laser materials processing; optical fabrication; optical planar waveguides; optical polymers; optical resonators; photoresists; PDMS; atomic force microscopy; channel waveguide; direct laser writing; integrated optics; morphological properties; photoresist layer; planar waveguide; polydimethylsiloxane; ring resonator structures; Optical device fabrication; Optical ring resonators; Optical waveguides; Resists; Waveguide lasers;
Conference_Titel :
Advanced Semiconductor Devices & Microsystems (ASDAM), 2014 10th International Conference on
Conference_Location :
Smolenice
Print_ISBN :
978-1-4799-5474-2
DOI :
10.1109/ASDAM.2014.6998704
