Patterning innovative conducting interpenetrating polymer network by dry etching

Interpenetrating polymer networks, as biomimetic actuators, can become successful actuators in the field of microsystems providing they are compatible with micro-technologies. In this paper, we report a novel material synthesized from poly(3,4-ethylenedioxythiophene) and polyethylene oxide/nitrile butadiene rubber. The electroactive material is built as a pseudo trilayer and its lateral sides have been patterned using dry plasma etching at high etch rates and with vertical sidewalls. A chemical process and a “self-degradation” are proposed to explain such high etching rates. Preliminary actuation results show that micro-beams can move with very large displacements. These micro-sized actuators are potential candidates in numerous applications, including micro-switches, micro-valves, micro-optical instrumentation and micro-robotics.