Title :
High Q-factor InP Photonic Crystal nanobeam cavities for laser emission
Author :
Crosnier, Guillaume ; Bazin, Alexandre ; Monnier, Paul ; Bouchoule, Sophie ; Braive, R. ; Beaudoin, G. ; Sagnes, I. ; Raj, Ranga ; Raineri, Fabrice
Author_Institution :
Lab. de Photonique et de Nanostruct., Marcoussis, France
Abstract :
Fabrication of high Q-factor InP-based Photonic Crystal nanobeam cavities is demonstrated by improving ICP etching. We measure Q-factors as high as ~130,000 for passive cavities by integrating them on to SOI wire waveguides. Nanolasers exhibiting low lasing threshold are then obtained using this technology.
Keywords :
III-V semiconductors; Q-factor; etching; indium compounds; integrated optics; laser beams; laser cavity resonators; laser variables measurement; nanophotonics; optical fabrication; photonic crystals; semiconductor lasers; silicon-on-insulator; waveguide lasers; ICP etching; InP; SOI wire waveguides; high Q-factor indium phosphide photonic crystal nanobeam cavity fabrication; laser emission; nanolasers; silicon-on-insulator; Cavity resonators; Etching; Fabrication; Indium phosphide; Optical waveguides; Photonic crystals; Q-factor;
Conference_Titel :
Indium Phosphide and Related Materials (IPRM), 26th International Conference on
Conference_Location :
Montpellier
DOI :
10.1109/ICIPRM.2014.6880516
