• DocumentCode
    1785711
  • Title

    High Q-factor InP Photonic Crystal nanobeam cavities for laser emission

  • Author

    Crosnier, Guillaume ; Bazin, Alexandre ; Monnier, Paul ; Bouchoule, Sophie ; Braive, R. ; Beaudoin, G. ; Sagnes, I. ; Raj, Ranga ; Raineri, Fabrice

  • Author_Institution
    Lab. de Photonique et de Nanostruct., Marcoussis, France
  • fYear
    2014
  • fDate
    11-15 May 2014
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    Fabrication of high Q-factor InP-based Photonic Crystal nanobeam cavities is demonstrated by improving ICP etching. We measure Q-factors as high as ~130,000 for passive cavities by integrating them on to SOI wire waveguides. Nanolasers exhibiting low lasing threshold are then obtained using this technology.
  • Keywords
    III-V semiconductors; Q-factor; etching; indium compounds; integrated optics; laser beams; laser cavity resonators; laser variables measurement; nanophotonics; optical fabrication; photonic crystals; semiconductor lasers; silicon-on-insulator; waveguide lasers; ICP etching; InP; SOI wire waveguides; high Q-factor indium phosphide photonic crystal nanobeam cavity fabrication; laser emission; nanolasers; silicon-on-insulator; Cavity resonators; Etching; Fabrication; Indium phosphide; Optical waveguides; Photonic crystals; Q-factor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Indium Phosphide and Related Materials (IPRM), 26th International Conference on
  • Conference_Location
    Montpellier
  • Type

    conf

  • DOI
    10.1109/ICIPRM.2014.6880516
  • Filename
    6880516
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1785711