Title :
Micro-ring-resonator wavelength-selective filter using highly-stacked quantum dot intermixed waveguide
Author :
Takei, Y. ; Matsumoto, Akiyoshi ; Matsushita, Akira ; Akahane, Kouichi ; Matsushima, Y. ; Utaka, K.
Author_Institution :
Fac. of Sci. & Eng., Waseda Univ., Tokyo, Japan
Abstract :
We fabricated a double micro-ring-resonator wavelength-selective filter using the waveguide fabricated by the intermixing of InAs/InGaAlAs quantum dots grown on an InP (311)B substrate. Intermixing was done by using ICP-RIE etching and annealing technique at a low temperature of 650°C. The output-power contrasts of the device were 9.0 dB and 8.6 dB for TE and TM modes, respectively.
Keywords :
aluminium compounds; annealing; gallium compounds; indium compounds; micro-optics; microcavities; optical fabrication; optical filters; optical resonators; optical waveguides; semiconductor quantum dots; sputter etching; ICP-RIE etching; InAs-InGaAlAs; TE modes; TM modes; annealing; highly-stacked quantum dot intermixed waveguide; inductively coupled plasma-reactive-ion etching; microring-resonator wavelength-selective filter; output-power contrasts; quantum dots; temperature 650 degC; Annealing; Etching; Fabrication; Indium phosphide; Optical filters; Quantum dots; InAs/InGaAlAs; PL wavelength; intermixing; micro-ring-resonator; quantum dots; wavelength-selective-filter;
Conference_Titel :
Indium Phosphide and Related Materials (IPRM), 26th International Conference on
Conference_Location :
Montpellier
DOI :
10.1109/ICIPRM.2014.6880523
