Title :
Development and manufacture of electrostatic capacitive energy harvesting device
Author :
Knyazev, Ivan V. ; Dorzhiev, Vitalii Yu ; Gluhov, A.V. ; Panova, Anastasiya A.
Author_Institution :
Novosibirsk Factory of Semicond. Devices with Special Design Centre, Novosibirsk, Russia
fDate :
June 30 2014-July 4 2014
Abstract :
The design of MEMS electrostatic generator that converts the mechanical energy vibration into electrical energy is developed. The prototype of the generator has been implemented and tested. At vibration frequency of 67 Hz and external load resistance of 23.7 MΩ the output power of 175 W is achieved. The estimation of the maximum power density for one-capacitor and two-capacitor structures of MEMS generator is carried out.
Keywords :
electrets; electrostatic generators; energy harvesting; micromechanical devices; MEMS electrostatic generator; electrostatic capacitive energy harvesting device; frequency 67 Hz; mechanical energy vibration; power 175 W; resistance 23.7 Mohm; Electrets; Electrodes; Electrostatics; Estimation; Generators; Micromechanical devices; Vibrations; MEMS; electret; energy harvester;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2014 15th International Conference of Young Specialists on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4799-4669-3
DOI :
10.1109/EDM.2014.6882475
