Verification and demonstration up to 67 GHz of an on-chip antenna pattern measurement setup

In this paper, an antenna measurement setup built on a commercially available wafer prober is introduced. This setup allows to measure the radiation pattern of on-chip antennas up to 67 GHz. The measurements are performed in the near-field of the antenna under test and therefore a near-field to far-field transformation has been included. This transformation and the entire setup have been verified by a measurement of a standard gain horn antenna and further evaluated by a 2 by 2 patch array. The results show a high agreement with the simulation data.