Title :
Resolution and precision measurement of a three dimension force sensor based on piezoresistive conductive ink
Author :
Yanjie Liu ; Jiang Wu ; Haijun Han ; Tao Liu
Author_Institution :
State Key Lab. of Robot. & Syst., Harbin Inst. of Technol., Harbin, China
Abstract :
In order to achieve the function of measuring friction on contacting surface between wafer and manipulator in real time, in this paper, we mainly measured the resolution and precision of the three dimension force sensor based on piezoresistive conductive ink. Resolution of tangential force improves with preload in normal direction increasing and the maximum resolution is less than 0.025 N with 0.8 N preload. Maximum error is about 30.62% because of low tangential stiffness of elastomer. The experiment results indicate that this sensor has characteristics of small volume, high flexibility and high resolution, which is prospective for using in wafer transfer system with improvement of higher precision in the future.
Keywords :
elastomers; force measurement; force sensors; ink; manipulators; piezoelectric materials; piezoresistance; wafer-scale integration; 3D force sensor; contact surface; elastomer; friction measurement; manipulator; piezoresistive conductive ink; precision measurement; resolution measurement; tangential force; tangential stiffness; wafer transfer system; Force; Force measurement; Force sensors; Friction; Materials; Piezoresistance; Robot sensing systems; Flexible three dimension force sensor; Resolution measurement;
Conference_Titel :
Mechatronics and Automation (ICMA), 2014 IEEE International Conference on
Conference_Location :
Tianjin
Print_ISBN :
978-1-4799-3978-7
DOI :
10.1109/ICMA.2014.6885716
