Title :
The input shaping control of eletro-thermal MEMS micromirror
Author :
Minghui Shi ; Hao Zhang ; Qiao Chen
Author_Institution :
Coll. of Electron. & Inf. Sci., Soochow Univ., Suzhou, China
Abstract :
To suppress the residual vibration of electrothermal MEMS micromirror caused by step signal, the dynamic model is established based on the theory analysis of mechanical vibration response and damping. The input shaping technique is used to eliminate and reduce the residual vibration. The simulation and experimental results verify the reliability of the control method and show that the overshoot has been significantly reduced; setting time is within 8ms and shortens 70.69% compared with the original system.
Keywords :
damping; micromechanical devices; micromirrors; vibration control; control method; damping; eletrothermal MEMS micromirror; input shaping control; mechanical vibration response; microelectromechanical system; residual vibration elimination; residual vibration reduction; residual vibration suppression; time 8 ms; Actuators; Laser beams; Micromechanical devices; Micromirrors; Optical switches; Vibrations; MEMS micromirror; input shaping control; mechanical response model; thermal response model;
Conference_Titel :
Mechatronics and Automation (ICMA), 2014 IEEE International Conference on
Conference_Location :
Tianjin
Print_ISBN :
978-1-4799-3978-7
DOI :
10.1109/ICMA.2014.6885762
